BPS Series valves
▮ SPECIFICATIONS
Roughing Valve
▮ ROUGHING VALVE (BPS-CA) ▮
| Description | Specification | Remarks | |
|---|---|---|---|
| Pressure Range | < 5×10-9 Torr~ ATM | ||
| Leak Rate | < 8 x 10-9 Torr.l/s | ||
| Air (N2) Pressure | 70 ~ 100 psi (5-7 kg/cm2) | ||
| Material | Body | Al 6061 (Hard Anodized) | |
| Actuator | Al 6061 (Soft Anodized) | ||
| Seal O-ring material | Viton | Option : Kalrez, Uper FKM & FFKM | |
| Temperature | 120°C | Temp. accuracy: <+3°C reading (121°C ≤ Set ≤ 150°C) |
|
| Heating Temp Control | 20~120°C | Option: Heating type | |
| Actuator Type | Single Acting or Double Acting | ||
| Position Indicating | LED Display by Magnetic Sensor | Open/Close Sensing | |
| N2 purge | N2 flow | Option | |
| Reliability (BTBF) | 200,000 Cycles | ||
| Size | NW25/40/50/63/80/100/125/160 | Option : 2-stage Valve(soft pumping) | |
Gate Valve
▮ gate valve (bps-gv) ▮
| Description | Specification | Remarks | |
|---|---|---|---|
| Pressure Range | < 5×10-9 Torr~ ATM | ||
| Leak Rate | < 8 x 10-9 Torr.l/s | ||
| Air (N2) Pressure | 65-100 psi (4.5-7 Bar) | ||
| Material | Body | Al 6061 (Soft Anodized) | |
| Actuator | Al 6061 (Hard Anodized) | ||
| Seal O-ring material | Viton | Option : Kalrez, Uper FKM & FFKM | |
| Temperature | Temp ≤ 120°C | Body & Actuator Temp. accuracy: ≤ ± 3°C reading (121°C ≤ Set ≤ 180°C) |
|
| Heating Temp Control | 20~120°C | Option: Heating type | |
| Soft Pumping | ∮1/2″mm | ||
| Position Indicating | Valve position: open/close | Magnet DC24V | |
| N2 purge | N2 flow | Option | |
| Reliability (BTBF) | 30,000 Cycle | ||
| Size | ISO-F 50/63/80/100/125/160 | Option: Flange connection type | |
▮ dimensions ▮
| Size(mm) | A | B | C | D | E | F |
|---|---|---|---|---|---|---|
| 50 | 309 | 436 | 111 | 55.5 | 44 | 71 |
| 80 | 367 | 534 | 138 | 69 | 44 | 71 |
| 100 | 396 | 595 | 160 | 80 | 44 | 71 |
| 125 | 490 | 726 | 185 | 92.5 | 44 | 71 |
| 160 | 545 | 830 | 220 | 110 | 44 | 71 |
▮ channel dimensions ▮
| Channel | W | D | H |
|---|---|---|---|
| #1 | 137 | 200 | 132 |
| #4 | 228 | 250 | 182 |
#1 Channel Temp Controller Drawing
#4 Channel Temp Controller Drawing
AGV Protection Gate Valve
▮ AGV Protection Gate Valve (BPS-CG) ▮
| Description | Specification | Remarks | |
|---|---|---|---|
| Pressure Range | < 5×10-9 Torr~ ATM | ||
| Leak Rate | < 8 x 10-9 Torr.l/s | ||
| Air (N2) Pressure | 65-100 psi (4.5-7 Bar) | ||
| Material | Body | Al 6061 (Soft Anodized) | |
| Actuator | Al 6061 (Hard Anodized) | ||
| Seal O-ring material | Viton | Option: Kalrez, Uper FKM & FFKM | |
| Temperature | Temp ≤ 120°C | Body & Actuator Temp. accuracy: ≤ ± 3°C reading (121°C ≤ Special: ≤ 180°C) |
|
| Heating Temp Control | 20~120°C | Option: Heating type | |
| Close Response Time | ≤ 0.096 Sec | ||
| Position Indicating | Valve position: open/close | Magnet DC24V | |
| N2 purge | N2 flow | Option | |
| Reliability (BTBF) | 30,000 Cycles | ||
| Size | ISO-F 50/63/80/100/125/160 | Option: Flange connection type | |
▮ characteristics ▮
| Size(mm) | A | B | C | D | E | F |
|---|---|---|---|---|---|---|
| 50 | 309 | 436 | 111 | 55.5 | 44 | 71 |
| 80 | 367 | 534 | 138 | 69 | 44 | 71 |
| 100 | 396 | 595 | 160 | 80 | 44 | 71 |
| 125 | 490 | 726 | 185 | 92.5 | 44 | 71 |
| 160 | 545 | 830 | 220 | 110 | 44 | 71 |
▮ valve controller ▮
| Channel | W | D | H |
|---|---|---|---|
| #1~#4 | 345 | 250 | 152 |
▮ operation pendant ▮
| Channel | W | D | H |
|---|---|---|---|
| #1~#4 | 103 | 25 | 179 |
RPS Rotation Angle Valve
▮ RPS rotation angle valve (bps-ra-r) ▮
| Description | Valve for Remote Plasma | Specification | Remarks | |||
|---|---|---|---|---|---|---|
| BPS-RA-R | BPS-RS | BPS-RA-P | ||||
| Pressure Range | 🗹 | 🗹 | 🗹 | < 5×10-9 Torr~ ATM | ||
| Leak Rate | 🗹 | 🗹 | 🗹 | < 8 x 10-9 Torr.l/s | ||
| Driving Pressure | 🗹 | 🗹 | 🗹 | 65-100 psi (4.5-7 Bar) | CD or N2 | |
| Material | Body | 🗹 | 🗹 | 🗹 | Al 6061 (Soft Anodized) | ±20um |
| Actuator | 🗹 | 🗹 | 🗹 | Al 6061 (Hard Anodized) | ||
| Seal O-ring material | 🗹 | 🗹 | 🗹 | Viton | Option : Chemraz, Kalrez, Sillcon | |
| PCW Cooling | 🗹 | 🗹 | 🗹 | PCW:2~3Kg/cm2 | 1/4″ Lock(male_tyle) | |
| Actuator Type | 🗹 | 🗹 | 🗹 | Double Acting | ||
| Position Indicating | 🗹 | 🗹 | 🗹 | LED Display by Magnetic Sensor | Open/Close Sensing | |
| Purge Gas | Optional | Optional | 🗹 | Ar, N2 | 1/4″ VCRk(male_tyle) | |
| Reliability (BTBF) | 30,000 | 30,000 | 30,000 | Cycling | ||
| Size | NW25/40 | NW40/50 | NW25/40 | NW25/40/50/63/80 | Option: Specific customization possible | |
▮ dimensions ▮
| Size(mm) | A | B | C | D |
|---|---|---|---|---|
| 25 | 50 | 60 | 80 | 182 |
| 40 | 65 | 78.6 | 100.6 | 216 |
Port Size can be adjusted for customer’s needs.
RPS Gas Purge Angle Valve
▮ RPS gas purge angle valve (bps-ra-p) ▮
| Description | Valve for Remote Plasma | Specification | Remarks | |||
|---|---|---|---|---|---|---|
| BPS-RA-R | BPS-RS | BPS-RA-P | ||||
| Pressure Range | 🗹 | 🗹 | 🗹 | < 5×10-9 Torr~ ATM | ||
| Leak Rate | 🗹 | 🗹 | 🗹 | < 8 x 10-9 Torr.l/s | ||
| Driving Pressure | 🗹 | 🗹 | 🗹 | 65-100 psi (4.5-7 Bar) | CD or N2 | |
| Material | Body | 🗹 | 🗹 | 🗹 | Al 6061 (Soft Anodized) | ±20um |
| Actuator | 🗹 | 🗹 | 🗹 | Al 6061 (Hard Anodized) | ||
| Seal O-ring material | 🗹 | 🗹 | 🗹 | Viton | Option : Chemraz, Kalrez, Sillcon | |
| PCW Cooling | 🗹 | 🗹 | 🗹 | PCW:2~3Kg/cm2 | 1/4″ Lock(male_tyle) | |
| Actuator Type | 🗹 | 🗹 | 🗹 | Double Acting | ||
| Position Indicating | 🗹 | 🗹 | 🗹 | LED Display by Magnetic Sensor | Open/Close Sensing | |
| Purge Gas | Optional | Optional | 🗹 | Ar, N2 | 1/4″ VCRk(male_tyle) | |
| Reliability (BTBF) | 30,000 | 30,000 | 30,000 | Cycling | ||
| Size | NW25/40 | NW40/50 | NW25/40 | NW25/40/50/63/80 | Option: Specific customization possible | |
▮ dimensions ▮
| Size(mm) | A | B | C | D |
|---|---|---|---|---|
| 40 | 65 | 79 | 118 | 218.7 |
Port Size can be adjusted for customer’s needs.
RPS Gate Valve
▮ RPS gate valve (bps-rg) ▮
| Description | Valve for Remote Plasma | Specification | Remarks | |||
|---|---|---|---|---|---|---|
| BPS-RA-R | BPS-RS | BPS-RA-P | ||||
| Pressure Range | 🗹 | 🗹 | 🗹 | < 5×10-9 Torr~ ATM | ||
| Leak Rate | 🗹 | 🗹 | 🗹 | < 8 x 10-9 Torr.l/s | ||
| Driving Pressure | 🗹 | 🗹 | 🗹 | 65-100 psi (4.5-7 Bar) | CD or N2 | |
| Material | Body | 🗹 | 🗹 | 🗹 | Al 6061 (Soft Anodized) | ±20um |
| Actuator | 🗹 | 🗹 | 🗹 | Al 6061 (Hard Anodized) | ||
| Seal O-ring material | 🗹 | 🗹 | 🗹 | Viton | Option : Chemraz, Kalrez, Sillcon | |
| PCW Cooling | 🗹 | 🗹 | 🗹 | PCW:2~3Kg/cm2 | 1/4″ Lock(male_tyle) | |
| Actuator Type | 🗹 | 🗹 | 🗹 | Double Acting | ||
| Position Indicating | 🗹 | 🗹 | 🗹 | LED Display by Magnetic Sensor | Open/Close Sensing | |
| Purge Gas | Optional | Optional | 🗹 | Ar, N2 | 1/4″ VCRk(male_tyle) | |
| Reliability (BTBF) | 30,000 | 30,000 | 30,000 | Cycling | ||
| Size | NW25/40 | NW40/50 | NW25/40 | NW25/40/50/63/80 | Option: Specific customization possible | |
▮ dimensions ▮
| Size(mm) | A | B | C | D | E | F |
|---|---|---|---|---|---|---|
| 50 | 309 | 436 | 111 | 55.5 | 44 | 71 |
| 80 | 367 | 534 | 138 | 69 | 44 | 71 |
Port Size can be adjusted for customer’s needs.
3-Way Valve
▮ 3-way walve ▮
| Description | Specification | Remarks |
|---|---|---|
| Temp Range | < 200℃ | H/W Interlock : Bimetal |
| Temp Sensor | K-Type | |
| Heater Power supply | AC220V, 50/60Hz | Per Customer Request : AC110V, 50/60Hz available |
| Driving Unit Pressure | 70 ~ 100 psi (5~7 kg/cm2) | CDA or N2 |
| Material | Al (Hard Anodized) | 50㎛ ± 10% |
| Seal O-ring material | Teflon | |
| Actuator Type | Single or Double Acting | |
| Position Indicating | Magnetic Sensor | T/L Type |
| Size | NW40/50 | Option: Customer Special Size possible |
▮ dimensions ▮
| Size(mm) | A | B | C | D |
|---|---|---|---|---|
| 40 | 160 | 157 | 125 | 193 |
Port Size can be adjusted for customer’s needs.
Controller can accommodate up to 4 channels.
