LAON TMD Co., Ltd.

Other equipment

ETCH Equipment

Vacuum Oven System Equipment design (LAON, 3D model)

Vacuum Oven System

SOURCE350℃
Wafer size6”, 8”
ChamberCassette 2 Lots
TempRamp Up/Down control
Plasma Electrostatic Exclusion System Equipment design (LAON, 3D model)

Plasma Electrostatic Exclusion System

ApplicationLCD
Size6.5G
Vacuum Pressure760 Torr ~ 10-8 Torr
ChamberFor Static Electricity removal
Equipment size2,500 x 1,600 x 1,060
LogisticsL/L, PM
OLED Etch PM Equipment design (LAON, 3D model)

OLED Etch PM

ApplicationLCD, OLED
Alignment TypeCCD Vision Aligner
Vacuum Pressure760 Torr ~ 10-5 Torr
ProcessGLASS ETCH
Equipment size2,300(W) x 1,500(D) x 2,000 (H)
Plasma applicationCold Plasma, Thermal Plasma
OLED Evaporator PM Equipment design (LAON, 3D model)

OLED Evaporator PM

ChamberSTS304
EVA. SourcePoint cell, Linear source
Vacuum PressureLow Vacuum
Size5.5G
ESCThickness Controller, Substrate Heater, Substrate Rotation
FPD Logistics (L/L Chamber, TM Chamber) Equipment design (LAON, 3D model)

FPD Logistics
(L/L Chamber, TM Chamber)

ApplicationLCD, OLED
Alignment TypeCCD Vision Aligner
Vacuum Pressure760 Torr ~ 10-5 Torr
ProcessGLASS ETCH
Vacuum LogisticsTM, LL, UL
Equipment size2,300(W) x 1,500(D) x 2,000 (H)

OLED
(Half 6G Load Lock, Half 6G TM)

OLED (Half 6G Load Lock, Half 6G TM) Equipment design (LAON, 3D model)
Vacuum Equipment (Pre-Clean, Sputter, CVD Equipment Development, LL/UL, TM, Utility & System Design for Research) Equipment (LAON, 3D model)

Vacuum Equipment
(Pre-Clean, Sputter, CVD Equipment Development, LL/UL, TM, Utility & System Design for Research)

ApplicationOLED, Semiconductor
TypeSingle, Batch Type
Vacuum Pressure760 Torr ~ 10-7 Torr
Vacuum LogisticsTM, LL, UL, Inverter etc.
Etc.Customer Requirement Spec.
OLED Depo. Equipment (OLED Evaporator Chamber, L/L Chamber, TM Chamber) Equipment design (LAON, 3D model)

OLED Depo. Equipment
(OLED Evaporator Chamber, L/L Chamber, TM Chamber)

ChamberSquare & Vertical Shape
EVA. SourceCustomer Spec.
Vacuum PressureHigh ~ Low Vacuum (Full Range)
Vacuum LogisticsTM, LL, UL
ESCThickness Controller, Substrate Heater, Substrate Rotation
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TEL: 82-31-8077-2500 laontmd@laontmd.com 150-ho, 425, Doksanseong-ro, Osan-si, Gyeonggi-do, Republic of Korea, 18105